Barcode & Vision System （300mm Barcode & Vision System）
1．ID number reader location and label attachment location can be set arbitrarily
Wafer ID reader location and barcode attachment location can be set with ease by using a X, Y, θ robot.
2．High-performance vision system
High performance and high speed system is available for requirements with better image processing capabilities. It also provides great precision of wafer ID recognition even to images with noise.
3．Easily installed in existing lines
As a stand-alone system, it is easy to install into an existing line.
- Host communication function
communication format: conforms to SECS-I and HSMS/Software: conforms to GEM