UV Irradiation System （200mm Fully-Automatic UV Irradiation System）
1．Fully-automatic improved process speed
This is a fully-automatic system with integrated cassette loader and unloader increases operational efficiency.
2．Controllable illuminance and light intensity
This equipment allows control of illuminance and light intensity for effective UV irradiation with high output UV lamp.
3．Uniform irradiation of entire surface
It adopts the method in which irradiation takes place during movement, achieving uniform irradiation of the entire surface.
4．Self-diagnosis function supports quality control
This is high performance system incorporates a self-diagnosis function that accurately detects irradiation errors.
- Host communication function
communication format: conforms to SECS-I and HSMS/Software: conforms to GEM