1．Ideal tape peeling
This equipment applies the 180-degree tape peeling technique to peel back grinding tape from the wafer, minimizing stress on the wafer.
2．Automatic control of UV intensity and quantity of light
The equipment's built-in sensor provides feedback control to maintain constant UV intensity and quantity of light, which also enables stable peeling of UV curable back grinding tape.
BG Tape Remover （200mm Fully-Automatic BG Tape Remover）
- Host communication function
communication format: conforms to SECS-I and HSMS/Software: conforms to GEM