TAPE

We offer various tapes.

BG Tape E series (UV Curable BG Tape)

For Standard Back Grinding Process
-Standard (>100 μm wafer)-

The indicated values are measured values and not intended for guarantee use.

E-6142S(S) E-6152B E-6170(S)
Tape Thickness(μm) 130 148 170
Appearance Opaque Blue Opaque
Structure Base Film (μm) PO
110
PO
108
PO
110
Adhesive
(μm)
20 40 60
Adhesion*1
(mN/25 mm)
Before UV 5400 6740 11300
After UV*2 55 50 55
Remark Standard Clear Blue (Transparent) For Low Bump

*1 Peeling speed= 300 mm/min, Peeling angle= 180deg. Adherend: Si mirror wafer

*2:UV ray intensity: 230 mW/cm2, UV ray dosage 380 mJ/cm2 Wavelength of ultraviolet should be around 365 nm.

For Standard Back Grinding Process
-Thin Wafer (>40 μm wafer)-

The indicated values are measured values and not intended for guarantee use.

E-8180HR
Tape Thickness(μm) 180
Appearance Blue
Structure Base Film (μm) Special Elastomer
160
Adhesive
(μm)
20
Adhesion*1
(mN/25 mm)
Before UV 5390
After UV*2 250
Remark Low Warpage

*1:Peeling speed= 300 mm/min, Peeling angle= 180deg., Adherend: Si mirror wafer

*2:UV ray intensity: 230 mW/cm2, UV ray dosage 380 mJ/cm2 Wavelength of ultraviolet should be around 365 nm.

E series(UV Curable BG Tape)

For Standard Back Grinding Process
-Anti-ESD-

The indicated values are measured values and not intended for guarantee use.

E-6130AS E-3090V AS
Tape Thickness(μm) 130 90
Appearance Opaque Blue
Structure Base Film (μm) PO
110
PET
Composite Film
80
Adhesive
(μm)
20 10
Adhesion*1
(mN/25 mm)
Before UV 5700 11000
After UV*2 55 30
Surface Resistivity*3
(Ω/□)
Before UV 1.0 x 1010 1.3 x 1010
After UV*2 9.1 x 1012 4.3 x 1012
Remark For DBG™

*1:Peeling speed= 300 mm/min, Peeling angle= 180deg. Adherend: Si mirror wafer

*2:UV ray intensity: 230 mW/cm2, UV ray dosage 380 mJ/cm2 Wavelength of ultraviolet should be around 365 nm.

*3:ADVANTEST DIGITAL ELECTROMETER R8252 ,Measurement : Adhesive side

E series(UV Curable BG Tape)

For Standard Back Grinding Process
-Bump Wafer-

The indicated values are measured values and not intended for guarantee use.

E-4230BS E-3281B E-8310LS342F E-8280 E-9486
Tape Thickness(μm) 230 280 310 280 485
Appearance Blue Blue Blue Blue Transparent
Structure Base Film
(μm)
PO
Composite Film
220
PET
Composite Film
270
Special
Elastomer
270
Special
Elastomer
260
PET
Composite Film
475
Adhesive
(μm)
10 10 40 20 10
Adhesion*1
(mN/25 mm)
Before UV 4165 16600 7600 9200 13000
(2600)*3
After UV*2 220 2800 270 480 1200
(240)*3
Remark For <80μm
Bump
For <100µm
Bump
for DBG™
For <100μm
Bump
For <150μm
Bump
For <250μm
Bump
for DBG™

*1: Peeling speed= 300 mm/min, Peeling angle= 180deg., Adherend: Si mirror wafer

*2: UV ray intensity: 230 mW/cm2, UV ray dosage: 550 mJ/cm2(For E-8310LS342F, E-8280 was 380 mJ/cm2 and E-9486 was 1120 mJ/cm2), Wavelength of ultraviolet should be around 365 nm.

*3: Peeling speed= 3000 mm/min, Peeling angle= 90deg., Adherend= Si mirror wafer

E series(UV Curable BG Tape)

For Special Process
-DBG™, SDBG/GAL Process-

The indicated values are measured values and not intended for guarantee use.

E-3125BN E-3100UN E-3090V E-3100V E-3140V
Tape Thickness(μm) 125 100 90 100 140
Appearance Blue Blue Blue Blue Blue
Structure Base Film
(μm)
PO
Composite Film
105
PET
Composite Film
80
PET
Composite Film
80
PET
Composite Film
80
PET
Composite Film
80
Adhesive
(μm)
20 20 10 20 60
Adhesion*1
(mN/25 mm)
Before UV 10780 13430 11500 12600 15600
After UV*2 50 50 50 40 60
Remark T.T.V. : Good T.T.V. : Better T.T.V. : Best T.T.V. : Best T.T.V. : Better

*1: Peeling speed= 300 mm/min, Peeling angle= 180deg., Adherend=Si mirror wafer

*2: UV ray intensity: 230 mW/cm2, UV ray dosage: 380 mJ/cm2, Wavelength of ultraviolet should be around 365 nm

E series(UV Curable BG Tape)

For Special Process
-Chemical Etching-

The indicated values are measured values and not intended for guarantee use.

E-3129R E-4141A E-6142S(S)
Tape Thickness(μm) 120 140 130
Appearance Blue Opaque Opaque
Structure Base Film
(μm)
PET
Composite Film
80
PO
120
PO
110
Adhesive
(μm)
40 20 20
Adhesion*1
(mN/25 mm)
Before UV 9800 3630 5400
After UV*2 196 690 55

*1: Peeling speed= 300 mm/min, Peeling angle= 180deg., Adherend=Si mirror wafer

*2: UV ray intensity: 230 mW/cm2, UV ray dosage: 380 mJ/cm2, Wavelength of ultraviolet should be around 365 nm.

*"DBG™" is trademark of LINTEC Corporation, Disco Corporation and KIOXIA Corporation.

"Stealth Dicing™" is trademark of Hamamatsu Photonics K.K.

For questions or estimations about semiconductor related products, please feel free to contact us.